http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113514499-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80228fea1bfe12324a6d4353d6702eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f47b003cf57e0fd214ca38504c5f7574 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-54 |
| filingDate | 2020-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a76301ff1a3260af8d0d5a3f1a4448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c90cc5cd0bc62ed9f5fd379b7ab008d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d655885a25f42f69a31a463150283ce6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b2b4593d7201af30469ac3e38230c33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f6961dcd6c1e3a2bf35aa5350950491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a443fbc4ae09810de29a44ef87568660 |
| publicationDate | 2021-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113514499-A |
| titleOfInvention | Embedded three-dimensional structure micro-heating plate, preparation method and gas sensor |
| abstract | The invention relates to the technical field of gas sensors and discloses an embedded three-dimensional structure micro-heating plate which comprises a silicon-based substrate and an electrode layer, wherein a concave cavity is formed in the surface layer of the silicon-based substrate; the electrode layer comprises a heating electrode and a measuring electrode, and the heating electrode and the measuring electrode are embedded in the concave cavity. The micro-heating plate adopts the embedded electrode layer, provides support for the electrode layer through the concave cavity structure, and has good mechanical stability. Because the heating electrode is embedded in the concave cavity, the heating space is optimized to be an embedded cavity structure from a plane structure which is completely exposed in the environment, the central heating area is slightly influenced by the environmental airflow, the heat convection is carried out in the cavity, and the heat radiation of the inner wall of the cavity is constant and uniform, so that the heat loss is slow, the heat loss is low, and the power consumption of the micro-heating plate can be reduced. The micro heating plate of the invention can ensure good mechanical stability under the condition of reducing power consumption. |
| priorityDate | 2020-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.