http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113494968-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5b43f4a86fc8f7ad28689d833acac53 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K15-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K15-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68714 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K15-00 |
| filingDate | 2020-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_888b16f880e13058ceac50bcfe9c3123 |
| publicationDate | 2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113494968-A |
| titleOfInvention | Temperature measurement and temperature calibration method and temperature measurement system |
| abstract | The invention relates to a temperature measurement and temperature calibration method and a temperature measurement system. The measurement method includes: placing a temperature calibration device with a first test structure having a first functional relationship between resistance and temperature on a bearing platform in a chamber; making the temperature of the chamber reach a set temperature; applying a voltage to the first The opposite ends of the structure are tested to obtain the corresponding current and resistance; the actual temperature of the temperature calibration device is obtained according to the relationship between the resistance and the first function. In the technical solution of the present application, a temperature calibration device with a first test structure having a first functional relationship between resistance and temperature is placed on the bearing table, and a voltage is applied to the relative position of the first test structure after the temperature of the chamber reaches the set temperature. At both ends, the corresponding current and resistance are obtained, the actual temperature of the temperature calibration device is obtained according to the relationship between the resistance and the first function, and the resistance is obtained by using the high-precision resolution of the current to obtain the actual temperature of the temperature calibration device, which improves the practicality of measuring the temperature calibration device. temperature accuracy. |
| priorityDate | 2020-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513094 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28718 |
Total number of triples: 28.