| abstract |
A high-purity gas supercharging device comprises a refrigerating system, a secondary refrigerant storage tank and a circulating system, a high-purity medium passage and a liquid supercharging pump, wherein after the high-purity gas enters the supercharging device, the high-purity gas is firstly cooled by an output medium and then further cooled by the refrigerating system, so that liquefaction and a certain supercooling degree are ensured, cavitation erosion in the working process of a gear pump is prevented, the supercharged high-purity liquid medium is heated and gasified by an input medium, the pressure in the gasification process is unchanged, and the supercharging of the gas medium is realized. The invention expands the application range of the liquid booster pump from liquid to gas, and can obtain gas with large flow and high pressure. The invention has convenient use and long service life and is suitable for the pressurization occasions of high-purity gas. |