| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-16 |
| filingDate |
2020-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37efce90b8eb75938637fafe0237df1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1211bdacc119b1b792626fbfd5780fe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60d03228d04a1e5ad8a0406be6f82504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5a519a476c0eea3e40e0cd292df9ba9 |
| publicationDate |
2021-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113366617-A |
| titleOfInvention |
Sacrificial protective layers for environmentally sensitive surfaces of substrates |
| abstract |
A method for protecting the surface of a substrate during processing comprising: a) providing a solution that forms a copolymer having an upper temperature limit; b) dispensing the solution on the surface of the substrate to form a sacrificial protective layer, wherein the copolymer is kinetically trapped to enable storage at temperatures above the upper limit temperature; c) exposing the substrate to the surrounding environment for a predetermined period of time; and d) passing The sacrificial protective layer is depolymerized using a stimulus selected from the group consisting of ultraviolet (UV) light and heat. |
| priorityDate |
2019-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |