| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68368 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 |
| filingDate |
2020-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7ec3e8ca2c34346cf1102f06314c119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1e26b37e9f452db64faa5f4b6b3a555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_705187f311d849e1d907985dd800ecef |
| publicationDate |
2021-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113366080-A |
| titleOfInvention |
Wafer expansion method and manufacturing method of semiconductor device |
| abstract |
The present invention provides a method for expanding a sheet, the method comprising: a step of expanding a first sheet (10) on which a plurality of semiconductor devices (CP) are bonded to expand the interval between the plurality of semiconductor devices (CP). The device (CP) has a first semiconductor device surface (W1) and a second semiconductor device surface (W3) on the opposite side of the first semiconductor device surface (W1). A protective layer (100) is included between the device surface (W3) and the above-mentioned first sheet (10). |
| priorityDate |
2019-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |