| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eae7e5b2da4ed117184c85e43f4b62e1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-08054
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-094076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0941
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0606 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 |
| filingDate |
2020-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8eb18e28f4e9c1ab5237192aabaf8d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6e31ffd3b091d688835b6b9a1addd21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7b7fd1650abd84f8c31b71940200822 |
| publicationDate |
2021-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113330651-A |
| titleOfInvention |
Diode-pumped solid-state laser device for laser annealing |
| abstract |
A laser annealing apparatus is provided comprising a plurality of frequency tripled solid state lasers, each outputting a radiation beam having a wavelength between 340 nm and 360 nm. The beam quality factor (M 2 ) of each output beam is greater than 50 on one horizontal axis and greater than 20 on the other horizontal axis. The output beams are combined and formed into a beam that is projected onto the substrate being annealed. Each output beam contributes to the length of the line bundle. |
| priorityDate |
2019-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |