| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2023-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2023-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113227277-B |
| titleOfInvention |
Substrate cleaning solution, method for manufacturing substrate cleaned using the substrate cleaning solution, and method for manufacturing device |
| abstract |
[Problem] Obtain a substrate cleaning solution that can remove particles by cleaning the substrate. [Solution]: The present invention is a substrate cleaning solution containing (A) insoluble or poorly soluble solute, (B) soluble solute and (C) solvent. |
| priorityDate |
2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |