http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113215540-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3417 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2017-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a4b0618821e4b6b92854040862bef89 |
| publicationDate | 2021-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113215540-A |
| titleOfInvention | Sputtering target and sputtering target manufacturing joint |
| abstract | The present invention relates to a sputtering target and a joined body for producing a sputtering target. A method for producing a sputtering target, comprising a step of inserting a target in a height direction of a frame portion of a backing plate so that the uppermost position of the target is higher than the uppermost position of the frame portion of the backing plate The material is inserted into the inner side of the frame portion of the backing plate; and the bonding step is to diffusion-bond the target material to the backing plate. |
| priorityDate | 2016-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.