| abstract |
An in-situ protective coating is deposited on the surfaces of the chamber components of the reaction chamber at elevated temperature. In situ protective coatings can be deposited at temperatures above about 200°C to provide protection against certain types of halogen chemicals (eg, fluorine-based, chlorine-based, bromine-based, or iodine-based) Resistant high quality coating. Subsequent coatings or layers may be deposited over the in-situ protective coating that have a different etch selectivity than the underlying in-situ protective coating. In situ protective coatings can be deposited throughout the reaction chamber to deposit on surfaces of chamber components, including on chamber walls. |