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filingDate 2021-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13a4cfdd83a69f2aa87215f6bab695de
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publicationDate 2021-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113183008-A
titleOfInvention A kind of porous polyurethane polishing pad and its polishing pad concave forming method
abstract The invention discloses a porous polyurethane polishing pad and a method for forming a concave portion of the polishing pad, which comprises a polishing inner core, a connecting bump, a central hole, a mixed polyurethane foam and a surface concave portion. The polishing pad is machined with a central hole in the polishing inner core, And first install the air rod in the center hole, and then apply the prepared mixed polyurethane foam to the upper and lower sides of the polished inner core. There is a porous structure in the mixed polyurethane foam. After the mixed polyurethane foam is dried, the air blowing rod is taken out from the reserved hole of the mixed polyurethane foam, and the reserved hole is processed into a surface recess, and the workpiece is polished. During the polishing operation, due to the existence of the surface concave portion, the polishing force on the workpiece is different in different parts of the polishing pad, which avoids the problem that the polishing effect of the workpiece decreases after the surface protrusion of the workpiece is ground, and effectively improves the polishing effect.
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