http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113178376-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2021-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2023-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2023-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113178376-B |
| titleOfInvention | A semi-closed double-cavity tubular array electrode device |
| abstract | The invention discloses a semi-closed double-cavity tubular array electrode. The semi-closed double-cavity tubular array electrode includes a structural unit, a control unit, an electrode unit and a vacuum unit. The structural unit is a movable frame box structure. The control unit is connected to the structural unit and the electrode unit respectively, the electrode unit is connected to the structural unit and the control unit respectively, the positive and negative electrodes of the electrode unit are both in the form of a tubular structure, and the positive and negative electrodes are arranged at equal intervals to form an array electrode , performing plasma treatment on thin film materials, and the vacuum unit is connected with the electrode unit. In the present invention, two specific parts of the thin film material are respectively placed inside the electrode unit, and the array electrode is discharged under a low voltage state to generate plasma, and the specific parts of the thin film material in the two chambers are treated simultaneously, and then Achieve technical effects such as uniform material surface treatment, fast processing efficiency, high integration, and simple operation. |
| priorityDate | 2021-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425901710 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID712 |
Total number of triples: 15.