http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113133174-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1776b91be1c4e0bfb6e4dfa95c96b91 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-16 |
| filingDate | 2021-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a017a18cf58788822a1dced6211320f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ede8e0523290305231f9f440effb440 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75cf69f945fe5bbd8c981ba3c0b0035b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b679128ab74357f121c2171f9c6d268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25df9e4684b4e55d17deab9b193a3b06 |
| publicationDate | 2021-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113133174-A |
| titleOfInvention | Helicon-ion cyclotron resonance coupling discharge system |
| abstract | The invention discloses a helicon wave-ion cyclotron resonance coupling discharge system which structurally comprises an air inlet pipeline (1), an air inlet seal (2), a helicon wave discharge chamber (3), a discharge tube (4), a helicon wave antenna (5), an isolation plate (6), an ion cyclotron heating chamber (7), an ion cyclotron antenna (8), a diffusion partition plate (9), a diffusion seal (10), a diffusion chamber (11), a diffusion pump port (12), a magnet coil (13) and an antenna pump port (14). The system realizes the integration of ionization excitation and heating of high-density and high-temperature plasmas. The plasma excitation antenna and the heating antenna are arranged in a vacuum environment, power loss of the antennas is effectively reduced, safety of equipment operation is improved, physical isolation is arranged between the plasma excitation antenna and the heating antenna, mutual interference of electromagnetic waves of the plasma excitation antenna and the heating antenna can be effectively reduced, and plasma coupling efficiency is improved. By adjusting the power ratio of excitation and heatingControlling plasma electron density 10 15 ‑10 19 m‑ 3 Ion temperature 0-100eV, pulsed/continuous discharge. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116133224-A |
| priorityDate | 2021-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 22.