http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113130677-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-118 |
| filingDate | 2021-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113130677-B |
| titleOfInvention | A kind of silicon optical device with moth-eye structure and preparation method thereof |
| abstract | The invention relates to a silicon optical device with a moth-eye structure and a preparation method thereof. The surface of the silicon optical device is provided with a moth-eye structure, including two different periodic pyramid structures nested, and the small-period pyramid structure is located in the large-period pyramid structure The distance between the vertices of the adjacent large-period reflective structures is between 15 and 70 μm, and the distance between the vertices of the adjacent small-period reflective structures is between 0.3 and 8 μm. Compared with the prior art, the present invention can slow down the sudden change of the refractive index of the silicon and vacuum interface, reduce the interface reflection, and improve the millimeter, sub- The transmission of electromagnetic wave signals in the millimeter waveband enhances the collection efficiency of astronomical detection signals. |
| priorityDate | 2021-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.