http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113097051-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e077b4d300df3e9f341b23583ffc883 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-16 |
| filingDate | 2021-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36775d3d92c56f0474e9e3c333556bc0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fe273407fe4a5db45a654790b3afad5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e081cbdde2dc5087f52b97816fd014b5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec690e9c11bcbd0594cea7a80e387e21 |
| publicationDate | 2021-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113097051-A |
| titleOfInvention | Preparation method of sensor core element |
| abstract | The invention relates to a preparation method of a sensor core element. The preparation method of the sensor core element comprises the following steps: providing a sensitive elastomer, wherein the sensitive elastomer comprises an elastic base body and a sensitive circuit manufactured on the elastic base body; carrying out treatments such as glue homogenizing, exposure, development, film erecting, etching and the like on the sensitive elastomer to obtain a sensor core body; carrying out silicon dioxide film coating on the sensor core body so as to form a protective film on the surface of the sensor core body; removing photoresist on a pad position of the sensor core and silicon dioxide attached to the photoresist by using a dibasic ester solvent to obtain a core element; cleaning the core element; and drying the cleaned core element. By using the method, the use of highly toxic hydrofluoric acid and ammonia fluoride which are extremely unfriendly to the environment can be avoided in the preparation process of the core element, the damage to the health of a human body and the ecological environment in the processing process of the core element is reduced, and the preparation of the sensor core element is safer. |
| priorityDate | 2021-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.