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publicationDate 2021-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113053882-A
titleOfInvention Integrated circuit device and method of forming the same
abstract A transistor includes a gate structure having a first gate dielectric layer and a second gate dielectric layer. A first gate dielectric layer is disposed over the substrate. The first gate dielectric layer includes a first type of dielectric material having a first dielectric constant. The second gate dielectric layer is disposed over the first gate dielectric layer. The second gate dielectric layer includes a second type of dielectric material having a second dielectric constant. The second dielectric constant is greater than the first dielectric constant. The first dielectric constant and the second dielectric constant are each greater than the dielectric constant of silicon oxide. Embodiments of the present invention also relate to semiconductor devices and methods of forming the same.
priorityDate 2020-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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