http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113013163-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be61cee18c50916a3fa39b7f5d721be9 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 |
filingDate | 2021-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b257e85da11ebecc980be228b2a5a17 |
publicationDate | 2021-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-113013163-A |
titleOfInvention | Micro-display driving chip structure and manufacturing process thereof |
abstract | A micro display driving chip structure and a manufacturing process thereof belong to the technical field of micro display driving chips, and the micro display driving chip structure comprises a semiconductor substrate, and an MOSFET module and a polycrystalline silicon thin film transistor module which are arranged on the semiconductor substrate, wherein a monocrystalline silicon active area is arranged on the semiconductor substrate, the MOSFET module is arranged on the monocrystalline silicon active area, shallow trench isolation structures are respectively arranged on two sides of the monocrystalline silicon active area, a polycrystalline silicon active area is arranged above one shallow trench isolation structure, and the polycrystalline silicon thin film transistor module is arranged on the polycrystalline silicon active area. |
priorityDate | 2021-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578708 |
Total number of triples: 15.