abstract |
The invention discloses an inorganic solar cell based on multi-stage in-situ heat treatment, which belongs to the field of inorganic thin film photovoltaic power generation. layer, Sb 2 Se 3 absorber layer and metal electrode, the Sb 2 Se 3 absorber layer is prepared by adopting multi-stage in-situ heat treatment. On the basis of in-situ heat treatment, a multi-stage in-situ treatment is further applied synergistically, that is, thermal annealing treatment in an atmosphere of hydrogen selenide and hydrogen sulfide to supplement selenium atoms and sulfur atoms to the Sb 2 Se 3 film, fill defects, and promote crystallinity. Re-grown, thereby improving the flatness of the film, reducing defects, further improving the quality of the film, and improving the performance of photovoltaic devices. |