http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112939576-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bced9d1cd00be5d778ab1152751eef1f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62695 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-01 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-626 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-01 |
| filingDate | 2021-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0c3e8c6419b199501a17777466fd892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ff6f86003057562cbfc0fb482e7a0d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d8c2094b9b771bd43c564357664af89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c101958eaf7d28caaacef4bf5fbdd132 |
| publicationDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-112939576-A |
| titleOfInvention | A kind of IGZO powder, target material and preparation method thereof |
| abstract | The invention discloses a preparation method of IGZO powder, which belongs to the field of industrial material preparation. In the IGZO powder preparation method of the present invention, a specific auxiliary agent with dispersing and sticking functions is selected and directly mixed with the oxide raw material, and then ultrasonically treated and then ground, which not only ensures the bonding effect and the particle uniformity of the final product; At the same time, ultrasonic vibration treatment is used to improve the uniformity of the slurry, which avoids the agglomeration phenomenon caused by the failure of the dispersant caused by the long grinding time in the traditional solid-phase method, or the stability of the surface of the powder particles caused by long-term mechanical friction. question. The method uses few kinds of auxiliary agents and introduces less impurity elements, which can reduce product defects. The invention also discloses the IGZO powder prepared by the method, and the material has high stability and uniformity. The invention also discloses an IGZO target prepared from the IGZO powder and a preparation method thereof. The obtained IGZO target has high density and purity and few defects, and can be used in the preparation of industrial high-performance IGZO films. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114163217-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116041047-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115304359-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115304359-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114180938-A |
| priorityDate | 2021-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.