| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2019-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e962daa8e899f5294fa8c79cc08a7c77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7beabe17be1c7b4cba93e98b967e8389 |
| publicationDate |
2021-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-112771648-A |
| titleOfInvention |
Composition for polishing gallium oxide substrate |
| abstract |
Providing: a polishing composition which can achieve both a high polishing rate and high surface quality in the polishing of a gallium oxide substrate, and a method for polishing a gallium oxide substrate and a method for producing the same. [ solution ] according to the technology disclosed herein, a polishing composition for polishing a gallium oxide substrate is provided. The polishing composition includes abrasive grains and water. By polishing with such a polishing composition, the polishing rate of a gallium oxide substrate can be increased, and a gallium oxide substrate having good surface quality can be realized. |
| priorityDate |
2018-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |