| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c6559f3980e30c92d20faa21b49e4725 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09G2330-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09G2330-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09G3-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H50-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-27 |
| filingDate |
2019-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20095ef1021184ab6fb3a608a90c3b6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7c7372005ed44e4e306adeb46bce3fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c6adfcbde9659df23da4577455ebe77 |
| publicationDate |
2021-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-112739643-A |
| titleOfInvention |
MEMS display device with automatic inspection mechanism |
| abstract |
A microelectromechanical system (MEMS) device includes: a substrate; an electronic circuit mounted on the substrate; a movable element mounted on the substrate, wherein an operating voltage is applied through the electronic circuit to control the movement of the movable element movement; a stopper mounted on the base plate, wherein movement of the movable element is prevented by mechanical contact of the stopper with the movable element; and an automatic inspection mechanism, the automatic inspection mechanism is A test voltage is applied between the movable element and the stopper and it is determined whether there is leakage current. The automatic inspection mechanism is at least partially mounted on the base plate. The test voltage is lower than the working voltage. |
| priorityDate |
2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |