| abstract |
The invention provides a gallium oxide doped tin oxide ceramic target material and a preparation method. The raw materials are composed of tin oxide and gallium oxide high-purity nano-powder according to the mass percentage, and the component ratio is 2 to 10% of gallium oxide, oxidized Tin 90~98%. After the powder is weighed and mixed, ammonium polyacrylate, polyvinyl alcohol and pure water are added. The mixed slurry is ball-milled and then granulated and dried. The obtained mixed powder is pressed and formed by an oil press and an isostatic press in sequence, and then degreasing-multi-step sintering is used for integration. The gallium oxide doped tin oxide ceramic targets were prepared by sintering technology at different sintering temperatures. The gallium oxide doped in the invention can effectively improve the sintering performance of tin oxide ceramics, significantly improve the density of the tin oxide ceramic target material, and at the same time, through the effective control of the preparation process, the gallium oxide doped with uniform structure and fine grains can be obtained Tin oxide target. |