abstract |
The embodiments of the present application disclose an optical collimator, a semiconductor device and a method for forming the same. The method is economical, and manufactures a multifunctional collimator structure for a contact image sensor to filter ambient infrared light to reduce noise. In one embodiment, an optical collimator includes a dielectric layer; a substrate; a plurality of vias; and a conductive layer, wherein the dielectric layer is formed over the substrate, wherein the plurality of vias are configured along a first portion of the dielectric layer. a laterally extending array of surfaces, wherein each of the plurality of vias extends in a vertical direction from a first surface of the dielectric layer through the dielectric layer and the substrate to a second surface of the substrate, and wherein the conductive layer is formed on the dielectric a first surface of the layer and at least one of a portion of a sidewall of each of the plurality of vias, and wherein the conductive layer is configured to allow the optical collimator to filter a range of wavelengths of light. |