http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112585459-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e41651508566f0385833e1ba14a21ffd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd6276741b8aafe9487abe43023e508 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf36a2013e5ca17e589a906b520c993 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b2c679ded8925bbec944a6cfaadde09 |
| publicationDate | 2021-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-112585459-A |
| titleOfInvention | Method of forming an ion sensor |
| abstract | A method for fabricating a sensor comprising: etching an insulating layer disposed over a substrate to define openings exposing a sensor surface of a sensor disposed on the substrate, thereby forming a native oxide on the sensor surface; The sensor surface is annealed in a hydrogen-containing atmosphere, and the sensor surface is annealed in an oxygen atmosphere at a temperature not greater than 400°C. In addition, a conformal conductive layer may be formed on top of the sensor surface, and portions of the conformal conductive layer may be removed from the top surface of the insulating layer, thereby forming a cup-shaped electrode, which may be controlled in a hydrogen-containing atmosphere. The top surface is annealed, and the top surface of the cup-shaped electrode is annealed in an oxygen atmosphere at a temperature not greater than 400°C. |
| priorityDate | 2018-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.