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filingDate 2021-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5fda3868bddc31c41870dac4058fe7
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publicationDate 2021-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-112552055-A
titleOfInvention A method for high temperature co-firing composite substrate of metal and silicon nitride ceramics
abstract The invention discloses a method for a high-temperature co-firing composite substrate of metal and silicon nitride ceramics, comprising multi-layer ceramics, a silicon nitride ceramic green body film and tungsten-molybdenum slurry. Screen printing process, lamination process, slicing process and production process, devices include: debinding furnace and atmospheric pressure sintering furnace, silicon nitride ceramic green film production process includes: silicon nitride ceramic powder, sintering aid yttrium oxide, Binder, leveling agent and plasticizer, the weight ratio is that yttrium oxide accounts for 4% to 7% of the total weight, the binder accounts for 4% to 8% of the total weight, and the plasticizer and the leveling agent account for the total weight 5% to 8% of the silicon nitride ceramic powder, and the rest is silicon nitride ceramic powder. The above materials are mixed to form a green embryo film and put into a nitrogen atmosphere to remove the glue to obtain a silicon nitride ceramic green green film; a metal and nitride film of the present invention The method of high temperature co-firing composite substrate of silicon ceramics has the advantages of high temperature co-firing metal and silicon nitride ceramics with high thermal conductivity and good flexural strength.
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