http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112534353-A

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filingDate 2019-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faba893318dcdb0cd5f1a3961c35ae8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d04851b6d5bd7c7afe92b254f633b84
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publicationDate 2021-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-112534353-A
titleOfInvention Photosensitive resin composition, method for forming resist pattern, method for producing plating formation, and semiconductor device
abstract The invention aims to provide a photosensitive resin composition capable of forming a resist pattern with excellent resolution and capable of coping with copper plating and nickel plating, a method for forming a resist pattern by using the photosensitive resin composition, and a plating formed object by using the resist patternThe composition contains a polymer (A) having a structural unit (a1) represented by the following formula (a1), a structural unit (a2) represented by the following formula (a2), and a structural unit (a3) represented by the following formula (a3), and a photoacid generator (B). In the formula (a3), R 33 Represents a hydroxyaryl group.
priorityDate 2018-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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