http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112530974-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7856 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-792 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42344 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-1157 |
| filingDate | 2020-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af48c9590c78dd8d9cc4b71bd42835a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b18e84e875a122aa05077ba5e23c23cd |
| publicationDate | 2021-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-112530974-A |
| titleOfInvention | Semiconductor structure, integrated circuit, and method of forming a semiconductor structure |
| abstract | A semiconductor structure, an integrated circuit, and a method of forming a semiconductor structure. A process for fabricating a finFET device is provided. The gate electrode layer is over the dielectric layer. Both the gate electrode layer and the dielectric layer are located on and around the fin-shaped semiconductor structure. The gate electrode is formed from the gate electrode layer by a two-step patterning process. In the first patterning step, the upper portion of the gate electrode layer is patterned. A dielectric film is then formed covering the patterned upper portion of the gate electrode layer. After the dielectric film is formed, a second patterning step is performed to pattern the lower portion of the gate electrode layer. |
| priorityDate | 2019-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.