| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5223 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 |
| filingDate |
2020-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97690b075c4da4e64fed47d67dcde27b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78fc2f87b4f7e31a8205c286cdc5aafe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_401002911f4d85f108b5110494eabbb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2b816357766ba330ccfbc88f59fe504 |
| publicationDate |
2021-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-112490220-A |
| titleOfInvention |
Integrated chip and metal-insulator-metal capacitor and method of forming the same |
| abstract |
Various embodiments of the invention relate to a metal insulator metal (MIM) capacitor including a diffusion barrier. The bottom electrode overlies the substrate. A capacitor dielectric layer overlies the bottom electrode. The top electrode overlies the capacitor dielectric layer. The top electrode includes a first top electrode layer, a second top electrode layer, and a diffusion barrier layer disposed between the first top electrode layer and the second top electrode layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114583048-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11621263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022115370-A1 |
| priorityDate |
2019-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |