http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112457930-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3773
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate 2020-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c7df139bb8b8a4400ab8cda5a63fb4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3672b16be9e01dfcbc6e20dbb5a76f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_416a3b848f275cfadcfc35f4c9bce7b7
publicationDate 2021-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-112457930-A
titleOfInvention Surface treatment composition, method for producing surface treatment composition, method for surface treatment, and method for producing semiconductor substrate
abstract The present invention relates to a surface treatment composition, a method for producing the surface treatment composition, a method for surface treatment, and a method for producing a semiconductor substrate. [Problem] To provide a solution that can sufficiently remove organic residues existing on the surface of a polished object made of silicon oxide or polycrystalline silicon. [Solution] A surface treatment composition for treating the surface of a polished object, comprising: a polymer having a structural unit represented by the following formula (1) and water, in formula (1), R 1 is a hydrocarbon group having 1 to 5 carbon atoms, and R 2 is a hydrogen atom or a hydrocarbon group having 1 to 3 carbon atoms.
priorityDate 2019-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412076115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425823269
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID753
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6915
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457766247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483452
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410932322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425035971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413994441
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88358
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13548210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408114405
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413994487
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8697
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415170710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22134451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412833275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411832430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420118110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7866
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408516378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8314
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1100
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261

Total number of triples: 64.