| abstract |
Valve assembly for use with processing chambers for film deposition on wafers. The valve body surrounds the bore and includes an inlet, a first outlet, and a second outlet, at least one of the outlets leading into the processing chamber. The piston includes a first section having a first flow path and a second section having a second flow path. A linear motion actuator is adapted to be coupled to the piston and to control linear motion of the piston through the bore between the first position and the second position. In the first position, the first section of the piston is aligned with the inlet such that fluid flows to the first outlet via the first flow path. In the second position, the second section of the piston is aligned with the inlet such that fluid flows to the second outlet via the second flow path. |