http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112323038-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d94573ab2c57e8b193f3a22accddf9fe |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0623 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate | 2020-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4959fcb2a0a1e2f45ed97c657793964a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb03d45f108cfe381fadc6fb48c2e8ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a29650d3d361393b34daee8da2d73544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45c47f015a2d0d8ad897c52e29e2c3a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bfbd0d91a53f0f02141e40de56f5ba2 |
| publicationDate | 2021-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-112323038-A |
| titleOfInvention | A device and method for in-situ optical annealing of chalcogenide films |
| abstract | The invention discloses a device and method for in-situ optical annealing of chalcogenide films. The device comprises a vacuum chamber, a rotating shaft, a driving motor, a rotating arm and a light source assembly. An evaporation source is arranged at the bottom of the vacuum chamber, so The top of the vacuum chamber is provided with a base for fixing the substrate, the rotating shaft is set on the side wall of the vacuum chamber, the driving motor is set inside the rotating shaft, one end of the rotating arm is connected to the rotating shaft, and the rotating shaft is connected to the rotating shaft. The other end of the arm is connected with the light source assembly, and the light source assembly is arranged at the end of the rotating arm. The method includes: preparing a chalcogenide film; making a light source assembly parallel to a substrate; and continuously illuminating the chalcogenide film through an LED array. By using the present invention, the problem that the chalcogenide film is easily oxidized and polluted by air during ex-situ annealing, and the film is broken during subsequent processing due to thermal annealing is solved. As a device and method for in-situ optical annealing of chalcogenide films, the present invention can be widely used in the fields of vacuum evaporation and optical annealing. |
| priorityDate | 2020-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.