| abstract |
The invention relates to a semiconductor chip cleaning agent, which comprises a wetting stripping composition composed of a wetting stripping agent and perfluoro-end-group polyoxyethylene ether, and also can comprise a penetrating agent, a solubilizer, a composite functional agent, a nitrogen-containing complexing agent, an organic auxiliary agent and ultrapure water, and also provides a preparation method and application thereof and a cleaning method of a semiconductor chip. The cleaning agent obtains excellent technical effect by containing the wetting stripping composition consisting of specific components and the preferable combination and cooperation of the penetrating agent, the composite functional agent and the nitrogen-containing complexing agent, and has good industrial application prospect and popularization potential in the technical field of semiconductor chip cleaning. |