| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36a1a2142aeb815ad2f2df10a114bff7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C255-17 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C255-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C253-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2020-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3de14ae8651048427229e5f154c8a44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25104450a3962a7905c28326ccb43953 |
| publicationDate |
2020-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-112114495-A |
| titleOfInvention |
Fluorine-free photoacid generator and preparation method thereof |
| abstract |
The invention discloses a fluorine-free photoacid generator and a preparation method thereof, wherein the fluorine-free photoacid generator has the following structural general formula: wherein R is an aromatic group, Z + Is an onium salt cation. The fluorine-free photoacid generator prepared by the present invention has strong acidity and can be uniformly distributed in a photoresist system. The preparation condition is mild, and the preparation method is simple. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2793824-C1 |
| priorityDate |
2020-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |