| abstract |
The invention provides a high-density cyclic oxide coating material and a preparation method thereof. The present invention takes oxide powder as raw material, firstly adds binder according to a certain proportion, obtains powder with particle size ≤20 mesh through dry pressing, crushing, grinding and screening, and then adopts cold isostatic pressing to form green body. The green body is then sintered and densified at atmospheric pressure, and a segmented heating process is used to obtain a high-density billet under the process conditions of the highest sintering temperature of 1500-1550 °C, and then vacuum sintered, with a maximum sintering temperature of 1320-1350 °C, to obtain a fan-shaped ring. An oxide coating material, the fan-shaped ring-shaped oxide coating material is spliced to obtain a ring-shaped oxide coating material. The relative density of the oxide coating material is greater than or equal to 90%, the purity is greater than or equal to 99.99%, and the closed porosity is less than or equal to 5%. The coating material has the characteristics of high density, high purity and low sputtering. |