http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112074071-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53b4d53983adbf56dd0e7d0bf96f8ce5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-461 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F30-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2020-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4031deb2cef14630e9bcba60b1849062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3830570dca5071b9938094e568645e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dc0079eb0bffddc6574787f9751da41 |
| publicationDate | 2020-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-112074071-A |
| titleOfInvention | High-power plasma generating device of multichannel microwave source |
| abstract | The invention relates to the field of plasma equipment, in particular to a high-power plasma generating device of a multi-path microwave source, which solves the problems of small size and low power of plasmas in the prior art. The microwave plasma generating device comprises a plasma ignition device, a microwave generating device, a waveguide, a reaction cavity, an air inlet and a microwave cavity; the axis position of the microwave cavity is superposed with the axis of the reaction cavity; the microwave generating device is arranged around the microwave cavity; the number of the microwave generating devices is not less than three; the microwave cavity is a hollow cylindrical multi-cavity; the invention discloses a high-power plasma generating device of a multi-path microwave source, which realizes the excitation of large-power and large-size plasma by arranging a plurality of microwave generating devices at different distances and in staggered heights and uniformly and intensively binding electromagnetic waves at the central position of a quartz tube; the invention has simple structure, high excitation efficiency and low cost, and meets the requirement of industrialization on a large scale; the invention can be cascaded to realize effective superposition of power. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112863993-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112888134-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114423139-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114423139-B |
| priorityDate | 2020-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 23.