| abstract |
To provide a polyester film for a dry film resist, which can achieve high flatness and transparency, good film sliding properties, less thickness unevenness in the width direction of the film, and which can be wound into a roll shape. As such a new polyester film for DFR, which can prevent air from being trapped between the films, it is characterized by having a particle-containing surface layer on at least one side of a base polyester film having an intrinsic viscosity of 0.65 dl/g or more. The polyester film for dry film resist, the base polyester film contains particles with an average particle diameter of 0.030 to 0.200 μm in a mass ratio of 10 to 7000 ppm, and does not substantially contain particles with a particle diameter of 0.300 μm or more. A single-layer film formed of a polyester layer (referred to as "A layer") or a multi-layer film having the A layer on the surface, the particle-containing surface layer contains particles with an average particle diameter of 0.005 to 0.150 μm. |