Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-482 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-482 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-488 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate |
2019-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a51ffbf6610e831acb04a1851e42ec0c |
publicationDate |
2020-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-111987071-A |
titleOfInvention |
Semiconductor element with conductive cap layer on conductive plug and method of making the same |
abstract |
The present disclosure provides a semiconductor element having a conductive cap layer on a conductive plug and a method for fabricating the same. The semiconductor device has a semiconductor substrate, a first word line and a second word line disposed on the semiconductor substrate, and a conductive line disposed between the first word line and the second word line plug. The conductive element also has a conductive cap layer disposed on the conductive plug, wherein the conductive cap layer covers a portion of a top surface and a sidewall surface of the conductive plug. The semiconductor device also has a bit line disposed on the conductive cap layer, wherein the bit line is electrically connected to the conductive plug. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023134100-A1 |
priorityDate |
2019-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |