http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111965741-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 |
| filingDate | 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111965741-B |
| titleOfInvention | Method for forming microlens array |
| abstract | The invention provides a method for forming a micro-lens array, which comprises the steps of providing a wafer, wherein a micro-lens layer is formed on the wafer and comprises a plurality of chips; sequentially carrying out photoresist dripping operation on the chips; performing gas purging on the photoresist on the chip to adjust the morphology of the photoresist; carrying out photoetching operation after curing and baking the photoresist so as to form a photoresist mask with a specific shape on the chip; and transferring the profile of the photoresist mask to the microlens layer to form a microlens array having a profile corresponding to the photoresist mask on the wafer. According to the invention, the chips on the wafer are sequentially subjected to dispensing by adopting a stepping photoresist coating method, the appearance of the photoresist is adjusted by gas purging in the dispensing process, and the appearance of the photoresist is transferred to the microlens layer to form the microlens array with a specific appearance, so that CRA optimization is realized, and the aberration is reduced. |
| priorityDate | 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.