| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-784
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-782
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-763 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-117 |
| filingDate |
2019-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-111902383-B |
| titleOfInvention |
Composite sintered body, semiconductor manufacturing device component, and method for manufacturing composite sintered body |
| abstract |
The composite sintered body includes Al 2 O 3 and MgAl 2 O 4 . The Al 2 O 3 content in the composite sintered body is 95.5% by weight or more. The average sintered grain size of Al 2 O 3 in this composite sintered body is 2 μm or more and 4 μm or less. The standard deviation of the sintered particle size distribution of Al 2 O 3 in the composite sintered body is 0.35 or less. The bulk density of the composite sintered body is not less than 3.94 g/cm 3 and not more than 3.98 g/cm 3 . The ratio of the crystal phase amounts of MgAl 2 O 4 to Al 2 O 3 in the composite sintered body is 0.003 or more and 0.01 or less. Thereby, a composite sintered compact having a high withstand voltage and a high volume resistivity can be provided. |
| priorityDate |
2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |