| abstract |
The invention discloses an aluminum nitride ceramic substrate and a preparation method thereof, comprising the following steps: modifying aluminum nitride powder; modifying after mixing zirconia powder and yttrium oxide powder; Slurry, modified mixed powder, carbon black, alumina, lanthanum chloride, ethanol are put into a ball mill, and mixed by high-speed ball milling; add random polypropylene and polymethacrylate to the mixed slurry, mix and stir evenly, and obtain a flow Extending the slurry; the casting slurry is made into a green body by the tape casting process, and then cut into a ceramic green body, and then dried and punched to obtain a green body; the green body is placed in a vacuum resistance furnace, and heated and sintered by a multi-stage program , to obtain an aluminum nitride ceramic substrate. The aluminum nitride ceramic substrate prepared by the invention has high particle density, high strength, good flexural strength and fracture toughness, high thermal conductivity, low sintering temperature, simple preparation method, easy operation of preparation process, and high economic benefit. Suitable for industrial production. |