http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111847847-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-0075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B20-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-40 |
| filingDate | 2020-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111847847-B |
| titleOfInvention | Preparation method of quartz pendulous reed |
| abstract | The invention discloses a preparation method of a quartz pendulous reed, which comprises the following steps: s1, cleaning a wafer base material, S2, depositing a metal layer on the front side of the wafer, S3, depositing a metal layer on the back side of the wafer, S4, glue homogenizing, exposure, S5, developing, S6, corroding the metal layer, S7, corroding the base material, S8, taking a picture and storing. The wafer is uniformly provided with a plurality of swing pieces, and a plurality of swing pieces can be processed simultaneously, so that the processing efficiency of the swing pieces is improved, and the quality consistency of the swing pieces is improved. And processing the deposited metal layer on the wafer by using a photoetching process, so that the metal layer has the function of a mask and the processing precision of the product can be improved. The preparation method of the quartz pendulous reed can solve the problems of low production efficiency, low precision and poor quality stability of the existing pendulous reed. |
| priorityDate | 2020-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.