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filingDate 2020-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-111834226-A
titleOfInvention Semiconductor device and method for manufacturing the same
abstract A semiconductor device including a FET, comprising: an isolation insulating layer disposed in the trench of the substrate; a gate dielectric layer disposed over the channel region of the substrate; a gate electrode disposed over the gate dielectric layer; a source and a drain disposed adjacent to the channel region; and an embedded insulating layer disposed under the source, the drain, and the gate electrode, and both ends of the embedded insulating layer are connected to the isolation insulating layer. Embodiments of the present invention also relate to methods of manufacturing semiconductor devices.
priorityDate 2019-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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