http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111739822-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_203419448c7d6f110a93771f5b196459 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D46-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1832 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D46-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
filingDate | 2020-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bab823fad500b78d61586e6369a0428b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9f2353e999b6efd5fb21557097ebcff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_695a61168772873cbee753d50a878d66 |
publicationDate | 2020-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-111739822-A |
titleOfInvention | Operating device for chip processing and chip mounting method |
abstract | The invention provides an operating device for chip processing and a chip mounting method. The operation device includes: the shell defines a sealed operation chamber, and is provided with an air inlet, an air outlet and an operation opening capable of being opened and closed, wherein the air inlet is communicated with the operation chamber. The air inlet and the air outlet of the circulating air duct are communicated, the air outlet and the air inlet of the circulating air duct are communicated, the circulating air duct is provided with a fan filtering unit, and the fan filtering unit pumps the gas in the operation chamber into the circulating air duct for filtering and then into the operation chamber. According to the operating device for chip processing, the gas in the operating cavity can be circularly filtered through the circulating air duct, and the operating cavity is not communicated with the outside in the filtering process, so that the introduction of no outside micro-dust particles can be avoided, the filtering effect in the operating cavity is improved, the operating environment requirement of chip processing is met, and the processing quality of the chip is improved. |
priorityDate | 2020-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415794430 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94407 |
Total number of triples: 22.