http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111704391-B
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B22-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B26-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B20-1062 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28D5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B26-12 |
filingDate | 2020-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-111704391-B |
titleOfInvention | Diamond ceramic composite scribing knife and preparation method thereof |
abstract | The invention relates to the field of semiconductor processing, in particular to a diamond ceramic composite scribing knife and a preparation method thereof, wherein raw materials comprise resin, diamond, inorganic filler and pore-forming agent, the scribing knife is prepared by steps of mixing, filling, hot pressing, secondary hardening and the like and is manufactured by using a special die thereof, and the die comprises two compression dies, an outer die arranged between the two compression dies and an inner die arranged at the lower end of the compression dies; the inner mould comprises a bottom plate and inner-mould limiting columns which are uniformly fixed on the upper end surface of the bottom plate; the compression mould comprises a compression mould pipe which is uniformly fixed on the upper plate end surface, and the outer diameter of the inner-type limiting column is matched with the inner diameter of the compression mould pipe; the outer section mould comprises a middle plate and outer section holes uniformly formed in the middle plate, and the outer diameter of the press-forming pipe is matched with the inner diameter of each outer section hole. The invention can prepare the ultra-thin diamond scribing sheet with ultra-high geometric and positional accuracy, joint cutting surface quality, mechanical property and service life. |
priorityDate | 2020-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538410 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702 |
Total number of triples: 17.