| abstract |
The invention discloses a silicon-based OLED probe testing device and a testing method thereof, wherein the testing device comprises an electrical cabinet and a testing table arranged on the electrical cabinet, the testing table is provided with a probe table and a portal frame which is positioned above the probe table and can move horizontally, the probe table is provided with two probes for removing and pricking a Wafer peripheral PAD to light the whole screen, and the lower part of the portal frame is provided with a detection camera and a spectrometer corresponding to the probe table. Two probes are used for pricking peripheral PADs to supply power to Die so that the Wafer full screen is lightened, then an area array camera or a TDI linear array camera is used for carrying out rapid imaging analysis on the Wafer full screen, a probe card is not needed, and the Tact Time can be reduced by 76.8% compared with the conventional automatic probe station for testing the silicon-based OLED, so that the testing efficiency is improved, and the binding PADs cannot be damaged. |