http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111635701-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate | 2020-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111635701-B |
| titleOfInvention | Cobalt-based material polishing solution and application thereof |
| abstract | The invention relates to a cobalt-based material polishing solution and application thereof, wherein the cobalt-based material polishing solution comprises the following components in percentage by weight: liquid phase carrier 50-80%; 0.1 to 10 percent of abrasive; oxidant is less than or equal to 1 percent; 0.005-20% of ammonium salt compound; 0.1-100mM inhibitor. The invention has good application prospect by selecting and reasonably combining the proper oxidant, ammonium salt compound and inhibitor, improving the polishing rate through improving mechanical and chemical actions, controlling the corrosion condition of the Co surface and improving the surface quality. |
| priorityDate | 2020-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 121.