| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G25-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-235 |
| filingDate |
2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-111566179-B |
| titleOfInvention |
Compositions for performing material removal operations and methods of forming the same |
| abstract |
The present invention provides a composition comprising a carrier and abrasive particles contained in the carrier; the carrier comprising a liquid, the abrasive particles having an average of at least 10% by weight of the abrasive particles cerium oxide and Cerium 3+ ratio (Ce 3+/total cerium) of at least 0.1. In another embodiment, the slurry composition may include a liquid carrier comprising water, cerium oxide particles, and free silicate ions, wherein when polishing a silicon oxide wafer, the liquid carrier does not include free silicate ions. The material removal rate can be increased by at least 3% compared to the slurry composition. |
| priorityDate |
2017-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |