| abstract |
Embodiments of the present invention relate to devices for forming silicon-containing species. Provides treatment of by-products generated in the reaction of a raw material containing silicon and a halogen element, or a reaction between a raw material containing silicon and a raw material containing a halogen element, without removing the piping forming the discharge path The silicon-containing substance forming device. According to an embodiment, the silicon-containing substance forming apparatus includes a reaction chamber, a discharge mechanism, a processing liquid tank, a supply mechanism, and a flow path switching member. The discharge material from the reaction chamber is discharged through the discharge path of the discharge mechanism. The supply mechanism supplies the treatment liquid from the treatment liquid tank to the discharge path through the supply line, and treats by-products generated by the reaction in the discharge path with the supplied treatment liquid. The flow path switching member switches the communication state of the discharge path with each of the reaction chamber and the supply line. |