abstract |
The invention relates to a desorption rate testing device in a vacuum system. The device includes a vacuum chamber, a refrigerator and a cold shield, wherein the refrigerator includes a connected primary cold head and a secondary cold head, both of which extend into the vacuum chamber , the test target is set at the position of the secondary cold head; the cold shield extends from the primary cold head to the side of the secondary cold head, and surrounds the secondary cold head on the periphery and target. The invention can realize the goal of different target material tests under low temperature working conditions, and can solve the problems of large temperature control error and temperature control lag of the target material under different temperature working conditions. |