| abstract |
A method for preparing an ITO ceramic target with controllable grain size, comprising: mixing In 2 O 3 powder with a mass fraction of 90-97 and SnO 2 powder with a mass fraction of 10-3, and deionized water , diluent, binder and polymer materials are mixed with sand mill ball milling to obtain ITO ceramic slurry with a solid content of 70-80% and a viscosity of 120-300mpa.s, and the average of the mixed powder The particle size D50 is controlled at 100 to 300 nm; the ITO ceramic slurry is formed by pressure grouting to obtain an ITO ceramic green body with a relative density of 58 to 62%; the ITO ceramic green body is placed in a degreasing and sintering integrated furnace, heated to The degreasing temperature is 700-800 °C, and the ITO ceramic target is degreasing in a normal pressure oxygen atmosphere, and the time is set to 12-36 hours; the temperature is raised from the degreasing temperature to the first sintering temperature of 1600-1650 °C, and the atmospheric pressure oxygen atmosphere is kept for heat preservation. After 0 to 60 minutes, the temperature is then lowered to the second sintering temperature of 1500 to 1540° C., and the temperature is maintained in a normal pressure oxygen atmosphere for 12 to 36 hours to finally obtain an ITO ceramic target. |