| abstract |
The invention provides a resist composition which has less change with time and can produce a resist pattern with good pattern shape. The resist composition of the invention comprises a novolak resin having hydroxyl groups substituted with a group represented by the formula (3), an acid generator, a quencher and a solvent, wherein in the formula (3), R is a10 A hydrocarbon group having 1 to 20 carbon atoms (for example, a chain hydrocarbon group such as an alkyl group, an alkenyl group, and an alkynyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups), and represents a bonding end. |